Speaker
Description
For decades, surface acoustic wave devices have widely been used in radio frequency (RF) filters, sensors, and signal processing systems. This project focuses on the microfabrication of SAW delay lines and resonators, emphasizing the lithography steps used to define interdigital transducers (IDTs) on piezoelectric substrates. Devices are fabricated on 128° YX-cut lithium niobate and quartz. For many general applications, 128° YX-cut lithium niobate is chosen for its strong piezoelectric properties and efficient conversion between electrical and acoustic signals.
The process begins with substrate cleaning, followed by spin-coating a positive photoresist to achieve a uniform thin film. UV photolithography using maskless lithography is used to pattern fine electrode fingers with 2 µm width and 2 µm spacing, forming 50 finger-pair IDTs. After development, a thin gold layer is deposited to create the electrodes, and a lift-off process defines the final metal pattern. Careful control of exposure, alignment, and resist thickness is critical for achieving high-resolution features and minimizing defects.
The fabricated structures form two-port SAW devices that generate and detect acoustic waves traveling along the substrate surface. This work highlights how microfabrication techniques directly influence device performance and demonstrates the importance of lithography precision in RF microsystems and emerging acoustic-electronic technologies.
| Academic or Professional Status | Undergraduate Student |
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